(Q58801482)

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Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices

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Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices (English)

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author name string

Bharat Bhushan

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1

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Vilas N. Koinkar

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2

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publication date

November 1996

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published in

Sensors and Actuators A: Physical

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volume

57

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issue

2

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page(s)

91-102

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cites work

Contact-start-stop studies with silicon planar head sliders against thin-film disks

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Friction and wear studies of silicon in sliding contact with thin-film magnetic rigid disks

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Tribology of Ion Bombarded Silicon for Micromechanical Applications

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Modification of Tribological Properties of Silicon by Boron Ion Implantation

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The sliding friction and wear behavior of single-crystal, polycrystalline and oxidized silicon

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Nanoindentation studies of ion implanted silicon

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Tribological studies of silicon for magnetic recording applications (invited)

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Microtribological Characterization of Self-Assembled and Langmuir-Blodgett Monolayers by Atomic and Friction Force Microscopy

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Nanotribology: friction, wear and lubrication at the atomic scale

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Atomic-Scale Friction Measurements Using Friction Force Microscopy: Part I—General Principles and New Measurement Techniques

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Effect of normal load on microscale friction measurements

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DOI

10.1016/S0924-4247(97)80099-4

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(Q58801482)

Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices

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