Wikidata

(Q58897472)

English

New fluid filter structure in silicon fabricated using a self‐aligning technique

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Statements

title
New fluid filter structure in silicon fabricated using a self‐aligning technique (English)
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author name string
Göran Stemme
series ordinal
1
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Gjermund Kittilsland
series ordinal
2
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publication date
17 October 1988
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volume
53
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issue
16
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page(s)
1566-1568
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Identifiers

DOI
10.1063/1.99953
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