(Q59423041)

English

P2 dimer implantation in silicon: A molecular dynamics study

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P2 dimer implantation in silicon: A molecular dynamics study (English)
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H.F. Wilson
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S. Prawer
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P.G. Spizzirri
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D.N. Jamieson
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N. Stavrias
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D.R. McKenzie
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October 2006
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251
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2
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395-401
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