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English
Atomic Layer Deposition: An Overview
scientific article published on 01 January 2010
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Statements
instance of
scholarly article
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
title
Atomic layer deposition: an overview
(English)
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
author
Steven M. George
series ordinal
1
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
author name string
Steven M. George
series ordinal
1
0 references
publication date
1 January 2010
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
published in
Chemical Reviews
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
volume
110
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
issue
1
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
page(s)
111-131
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
Identifiers
DOI
10.1021/CR900056B
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
PubMed ID
19947596
1 reference
stated in
Europe PubMed Central
PubMed ID
19947596
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:19947596%20AND%20SRC:MED&resulttype=core&format=json
retrieved
13 February 2020
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