(Q62565682)

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:15995991%20AND%20SRC:MED&resulttype=core&format=json

13 January 2020

title

The mechanism of chemical vapor deposition of cubic boron nitride films from fluorine-containing species (English)

1 reference

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13 January 2020

1

1 reference

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13 January 2020

author name string

Chan CY

2

1 reference

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13 January 2020

Meng XM

3

1 reference

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13 January 2020

Fung MK

4

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13 January 2020

Bello I

5

1 reference

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13 January 2020

Lifshitz Y

6

1 reference

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13 January 2020

Lee ST

7

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13 January 2020

Jiang X

8

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13 January 2020

language of work or name

English

0 references

publication date

1 July 2005

1 reference

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Angewandte Chemie International Edition

13 January 2020

published in

1 reference

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13 January 2020

volume

44

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13 January 2020

issue

30

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13 January 2020

page(s)

4749-4753

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13 January 2020

Identifiers

DOI

10.1002/ANIE.200500320

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13 January 2020

1 reference