(Q63487978)

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Porous Silicon Formation and Electropolishing of Silicon by Anodic Polarization in HF Solution

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scholarly article

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Porous Silicon Formation and Electropolishing of Silicon by Anodic Polarization in HF Solution (English)

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author name string

X. G. Zhang

1

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publication date

1989

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Journal of the Electrochemical Society

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136

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5

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1561

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Identifiers

10.1149/1.2096961

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