Wikidata

(Q64012644)

English

Data mining for improving a cleaning process in the semiconductor industry

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Statements

title
Data mining for improving a cleaning process in the semiconductor industry (English)
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author name string
D. Braha
series ordinal
1
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A. Shmilovici
series ordinal
2
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publication date
2002
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volume
15
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issue
1
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page(s)
91-101
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Identifiers

DOI
10.1109/66.983448
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