(Q74491721)

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

title

Direct measurement of the reaction front in chemically amplified photoresists (English)

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

1

0 references

author name string

Christopher L Soles

2

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Dario L Goldfarb

3

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Brian C Trinque

4

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Sean D Burns

5

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Ronald L Jones

6

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Joseph L Lenhart

7

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Marie Angelopoulos

8

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

C Grant Willson

9

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Sushil K Satija

10

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Wen-Li Wu

11

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

language of work or name

English

0 references

publication date

1 July 2002

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

volume

297

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

issue

5580

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

page(s)

372-375

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

Identifiers

DOI

10.1126/SCIENCE.1072092

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:12130778%20AND%20SRC:MED&resulttype=core&format=json

11 November 2019

1 reference