(Q82965641)

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

title

Compliant membranes improve resolution in full-wafer micro/nanostencil lithography (English)

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

3

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

Oscar Vazquez-Mena

4

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

author name string

Katrin Sidler

1

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

Luis G Villanueva

2

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

Veronica Savu

5

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

Juergen Brugger

6

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

language of work or name

English

0 references

publication date

14 December 2011

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

volume

4

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

issue

3

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

page(s)

773-778

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

Identifiers

DOI

10.1039/C2NR11609J

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:22170588%20AND%20SRC:MED&resulttype=core&format=json

18 January 2020

1 reference