(Q84713250)

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

title

Optical interference lithography using azobenzene-functionalized polymers for micro- and nanopatterning of silicon (English)

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

4

1 reference

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9 February 2020

Matti Kaivola

5

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

author name string

Aleksandr Kravchenko

1

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

Andriy Shevchenko

2

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

Victor Ovchinnikov

3

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

publication date

8 August 2011

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9 February 2020

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

volume

23

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

issue

36

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

page(s)

4174-4177

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

Identifiers

DOI

10.1002/ADMA.201101888

1 reference

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:21823180%20AND%20SRC:MED&resulttype=core&format=json

9 February 2020

1 reference