(Q86491732)

English

Overcoming Si₃N₄ film stress limitations for high quality factor ring resonators

scientific article published on 01 September 2013

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Europe PubMed Central

PubMed ID

24104169

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

title

Overcoming Si₃N₄ film stress limitations for high quality factor ring resonators (English)

1 reference

stated in

Europe PubMed Central

PubMed ID

24104169

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

27 February 2020

2

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Europe PubMed Central

PubMed ID

24104169

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

author name string

Kevin Luke

series ordinal

1

1 reference

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Europe PubMed Central

PubMed ID

24104169

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

Carl B Poitras

series ordinal

3

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Europe PubMed Central

PubMed ID

24104169

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

Michal Lipson

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4

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Europe PubMed Central

PubMed ID

24104169

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

publication date

1 September 2013

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Europe PubMed Central

PubMed ID

24104169

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

27 February 2020

1 reference

Europe PubMed Central

PubMed ID

24104169

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

volume

21

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Europe PubMed Central

PubMed ID

24104169

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

issue

19

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Europe PubMed Central

PubMed ID

24104169

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

page(s)

22829-22833

1 reference

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Europe PubMed Central

PubMed ID

24104169

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

retrieved

27 February 2020

Identifiers

DOI

10.1364/OE.21.022829

1 reference

stated in

Europe PubMed Central

PubMed ID

24104169

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

27 February 2020

0 references

1 reference

Europe PubMed Central

PubMed ID

24104169

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:24104169%20AND%20SRC:MED&resulttype=core&format=json

(Q86491732)

Overcoming Si₃N₄ film stress limitations for high quality factor ring resonators

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