Wikidata

(Q108004206)

English

Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up

scientific article from 2021

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Statements

title
Self-Replication of Deeply Buried Doped Silicon Structures, which Remotely Control the Etching Process: A New Method for Forming a Silicon Pattern from the Bottom Up (English)
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author
Brigitte Voit
series ordinal
4
object named as
Brigitte Voit
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Anton Kiriy
series ordinal
3
object named as
Anton Kiriy
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Nataliya Kiriy
series ordinal
2
object named as
Nataliya Kiriy
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author name string
Christopher Schutzeichel
series ordinal
1
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publication date
June 2021
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volume
31
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page(s)
2100105
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issue
25
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