Wikidata

(Q125290288)

English

Evaluation of the Topographical Surface Changes of Silicon Wafers after Annealing and Plasma Cleaning

scientific article published on 13 December 2019

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title
Evaluation of the Topographical Surface Changes of Silicon Wafers after Annealing and Plasma Cleaning (English)
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author
Dinara Sobola
object named as
Dinara Sobola
series ordinal
5
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Marco Salerno
object named as
Marco Salerno
series ordinal
6
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author name string
Sebastian Stach
series ordinal
1
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Ştefan Ţălu
series ordinal
2
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Rashid Dallaev
series ordinal
3
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Ali Arman
series ordinal
4
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publication date
13 December 2019
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published in
Silicon
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volume
12
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issue
11
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page(s)
2563-2570
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Identifiers

 
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