(Q29010792)

23 March 2017

author name string

S. J. Randolph

series ordinal

1

1 reference

23 March 2017

J. D. Fowlkes

series ordinal

2

1 reference

23 March 2017

P. D. Rack

series ordinal

3

1 reference

23 March 2017

publication date

September 2006

1 reference

Critical Reviews in Solid State and Materials Sciences

23 March 2017

published in

1 reference

23 March 2017

volume

31

1 reference

23 March 2017

issue

3

1 reference

23 March 2017

page(s)

55-89

1 reference

Ion‐ and electron‐assisted gas‐surface chemistry—An important effect in plasma etching

23 March 2017

cites work

1 reference

https://api.crossref.org/works/10.1080/10408430600930438

Approaching the resolution limit of nanometer-scale electron beam-induced deposition

21 April 2017

1 reference

https://api.crossref.org/works/10.1080/10408430600930438

Aberration model of a multibeam scanning microscope for electron beam-induced deposition

21 April 2017

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Zur Theorie des Durchgangs schneller Korpuskularstrahlen durch Materie

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Secondary electron emission in the scanning electron microscope

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Digital electrostatic electron-beam array lithography

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Initial lithography results from the digital electrostatic e-beam array lithography concept

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Nanoscale electron-beam-stimulated processing

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Effects of heat generation during electron-beam-induced deposition of nanostructures

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Growth and simulation of high-aspect ratio nanopillars by primary and secondary electron-induced deposition

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

Focused electron-beam-induced etching of silicon dioxide

21 January 2018

1 reference

https://api.crossref.org/works/10.1080%2F10408430600930438

10.1080/10408430600930438

21 January 2018

Identifiers

DOI

1 reference