Wikidata

(Q57272764)

English

Initial lithography results from the digital electrostatic e-beam array lithography concept

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title
Initial lithography results from the digital electrostatic e-beam array lithography concept (English)
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author name string
L. R. Baylor
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1
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W. L. Gardner
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2
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X. Yang
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3
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R. J. Kasica
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4
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M. A. Guillorn
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5
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B. Blalock
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6
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H. Cui
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7
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D. K. Hensley
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8
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S. Islam
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9
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D. H. Lowndes
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10
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A. V. Melechko
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11
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V. I. Merkulov
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12
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D. C. Joy
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13
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P. D. Rack
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14
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M. L. Simpson
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15
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D. K. Thomas
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16
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publication date
2004
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volume
22
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issue
6
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page(s)
3021
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Identifiers

DOI
10.1116/1.1824060
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