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Removing drift from scanning probe microscope images of periodic samples

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Removing drift from scanning probe microscope images of periodic samples (English)

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https://doi.org/10.1116%2F1.589834

26 March 2017

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John T. Woodward

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January 1998

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Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

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16

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1

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51

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10.1116/1.589834

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(Q29031214)

Removing drift from scanning probe microscope images of periodic samples

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