(Q29999325)

English

Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography

scientific article (publication date: 12 June 2006)

In more languages

edit

Statements

instance of

scholarly article

0 references

title

Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography (English)

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

20 May 2017

1 reference

Matthew Weyland

2

0 references

David A. Muller

series ordinal

3

object named as

David A. Muller

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

author name string

Peter Ercius

series ordinal

1

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

Lynne M. Gignac

series ordinal

4

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

language of work or name

English

0 references

publication date

12 June 2006

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

published in

Applied Physics Letters

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

volume

88

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

issue

24

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

page(s)

243116

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

cites work

3D electron microscopy in the physical sciences: the development of Z-contrast and EFTEM tomography

1 reference

stated in

Crossref

reference URL

https://api.crossref.org/works/10.1063%2F1.2213185

retrieved

22 May 2017

A high efficiency annular dark field detector for STEM.

1 reference

stated in

Crossref

reference URL

https://api.crossref.org/works/10.1063%2F1.2213185

retrieved

21 January 2018

Identifiers

DOI

10.1063/1.2213185

1 reference

stated in

DOI.org query endpoint

reference URL

https://doi.org/10.1063%2F1.2213185

retrieved

20 May 2017

ResearchGate publication ID

234911543

0 references

(Q29999325)

Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography

Statements

Identifiers

Sitelinks

Wikipedia(0 entries)

Wikibooks(0 entries)

Wikinews(0 entries)

Wikiquote(0 entries)

Wikisource(0 entries)

Wikiversity(0 entries)

Wikivoyage(0 entries)

Wiktionary(0 entries)

Multilingual sites(0 entries)