(Q33438604)

English

The use of combinatorial chemical vapor deposition in the synthesis of Ti(3-delta)O4N with 0.06 < delta < 0.25: a titanium oxynitride phase isostructural to anosovite

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The use of combinatorial chemical vapor deposition in the synthesis of Ti(3-delta)O4N with 0.06 < delta < 0.25: a titanium oxynitride phase isostructural to anosovite (English)
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21 November 2007
15541-15548

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