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The materials challenge in diffraction-unlimited direct-laser-writing optical lithography

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The materials challenge in diffraction-unlimited direct-laser-writing optical lithography (English)

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Georg von Freymann

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Martin Wegener

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Martin Wegener

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Joachim Fischer

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20593434

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English

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1 August 2010

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32

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3578-3582

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20593434

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10.1002/ADMA.201000892

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28 July 2017

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Europe PubMed Central

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20593434

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44890190

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(Q33622623)

The materials challenge in diffraction-unlimited direct-laser-writing optical lithography

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