(Q33918596)

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Modeling for accurate dimensional scanning electron microscope metrology: then and now.

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scholarly article

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Europe PubMed Central

PubMed publication ID

30 July 2017

Modeling for accurate dimensional scanning electron microscope metrology: then and now. (English)

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Europe PubMed Central

PubMed publication ID

30 July 2017

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author name string

Michael T Postek

1

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Europe PubMed Central

PubMed publication ID

30 July 2017

András E Vladár

2

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Europe PubMed Central

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30 July 2017

publication date

31 May 2011

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Europe PubMed Central

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30 July 2017

number of pages

15

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Europe PubMed Central

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30 July 2017

33

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Europe PubMed Central

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30 July 2017

3

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Europe PubMed Central

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30 July 2017

111-125

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Europe PubMed Central

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30 July 2017

Simulated SEM images for resolution measurement

1 reference

https://api.crossref.org/works/10.1002%2FSCA.20238

21 January 2018

CASINO V2.42: a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users

1 reference

https://api.crossref.org/works/10.1002%2FSCA.20238

21 January 2018

Determination of Kilovolt Electron Energy Dissipation vs Penetration Distance in Solid Materials

1 reference

https://api.crossref.org/works/10.1002%2FSCA.20238

21 January 2018

Interlaboratory Study on the Lithographically Produced Scanning Electron Microscope Magnification Standard Prototype

1 reference

https://api.crossref.org/works/10.1002%2FSCA.20238

21 January 2018

X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement

1 reference

https://api.crossref.org/works/10.1002%2FSCA.20238

21 January 2018

Identifiers

10.1002/SCA.20238

1 reference

Europe PubMed Central

PubMed publication ID

30 July 2017

PubMed publication ID

1 reference

Europe PubMed Central

PubMed publication ID

30 July 2017

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