(Q34987297)
Statements
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65 nm feature sizes using visible wavelength 3-D multiphoton lithography (English)
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Seth R Marder
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Stephen Barlow
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Wojciech Haske
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Vincent W Chen
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Joel M Hales
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Wenting Dong
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Joseph W Perry
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1 March 2007
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15
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6
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3426-3436
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Identifiers
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