(Q46128534)
Statements
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Sub-10 nm nanoimprint lithography by wafer bowing (English)
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Wei Wu
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William M Tong
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Jonathan Bartman
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Yufeng Chen
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Robert Walmsley
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Zhaoning Yu
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Qiangfei Xia
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Inkyu Park
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Carl Picciotto
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Jun Gao
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Shih-Yuan Wang
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Deborah Morecroft
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Karl K Berggren
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7 October 2008
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8
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11
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3865-3869
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Identifiers
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