(Q53398164)
Statements
Giant piezoelectricity on Si for hyperactive MEMS (English)
D G Schlom
S H Baek
J Park
D M Kim
R R Das
D A Felker
J Lettieri
V Vaithyanathan
S S N Bharadwaja
N Bassiri-Gharb
Y B Chen
H P Sun
C M Folkman
D J Kreft
S K Streiffer
X Q Pan
M S Rzchowski
R H Blick
1 November 2011
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