(Q56213020)

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Helium ion microscope: A new tool for nanoscale microscopy and metrology

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scholarly article

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Helium ion microscope: A new tool for nanoscale microscopy and metrology (English)

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inferred from title

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1

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B. W. Ward

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Nicholas P. Economou

3

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N. P. Economou

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author name string

John A. Notte

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publication date

2006

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Journal of Vacuum Science & Technology B

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24

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6

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2871

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Identifiers

10.1116/1.2357967

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