(Q56267359)

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Excimer Laser Crystallization of Amorphous Indium-Tin-Oxide and Its Application to Fine Patterning

scholarly article by Hideo Hosono et al published 1 October 1998 in Japanese Journal of Applied Physics

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scholarly article

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title

Excimer Laser Crystallization of Amorphous Indium-Tin-Oxide and Its Application to Fine Patterning (English)

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1 reference

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1

Hideo Hosono

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author name string

Masaaki Kurita

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2

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Hiroshi Kawazoe

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3

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publication date

1 October 1998

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published in

Japanese Journal of Applied Physics

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volume

37

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issue

Part 2, No. 10A

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page(s)

L1119-L1121

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DOI

10.1143/JJAP.37.L1119

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(Q56267359)

Excimer Laser Crystallization of Amorphous Indium-Tin-Oxide and Its Application to Fine Patterning

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