(Q57072561)

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Optical projection lithography at half the Rayleigh resolution limit by two-photon exposure

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Optical projection lithography at half the Rayleigh resolution limit by two-photon exposure (English)

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Eli Yablonovitch

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Eli Yablonovitch

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publication date

1 February 1999

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Optical Engineering

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38

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2

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334

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Identifiers

10.1117/1.602092

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