(Q57087066)

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SU-8 cantilever chip interconnection

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scholarly article

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SU-8 cantilever chip interconnection (English)

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object named as

J Janting

2

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A Boisen

6

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author name string

A Johansson

1

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P Schultz

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K Hoppe

4

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I N Hansen

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publication date

9 January 2006

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Journal of Micromechanics and Microengineering

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16

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2

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314-319

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Identifiers

10.1088/0960-1317/16/2/016

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