(Q57256298)

English

Immersion lithography at 157 nm

article

In more languages

Statements

scholarly article

0 references

Immersion lithography at 157 nm (English)

0 references

author name string

M. Switkes

1

0 references

M. Rothschild

2

0 references

publication date

2001

0 references

Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

0 references

19

0 references

6

0 references

2353

0 references

Identifiers

10.1116/1.1412895

0 references

Sitelinks

Wikipedia(0 entries)

Wikibooks(0 entries)

Wikinews(0 entries)

Wikiquote(0 entries)

Wikisource(0 entries)

Wikiversity(0 entries)

Wikivoyage(0 entries)

Wiktionary(0 entries)

Multilingual sites(0 entries)

Retrieved from "https://www.wikidata.org/w/index.php?title=Q57256298&oldid=1778990506"