Wikidata

(Q57256299)

English

Extending optics to 50 nm and beyond with immersion lithography

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Statements

title
Extending optics to 50 nm and beyond with immersion lithography (English)
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author name string
M. Switkes
series ordinal
1
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R. R. Kunz
series ordinal
2
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M. Rothschild
series ordinal
3
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R. F. Sinta
series ordinal
4
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M. Yeung
series ordinal
5
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S.-Y. Baek
series ordinal
6
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publication date
2003
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volume
21
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issue
6
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page(s)
2794
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Identifiers

DOI
10.1116/1.1624257
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