Wikidata

(Q57386288)

English

Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy

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Statements

title
Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy (English)
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author name string
C. M. Flannery
series ordinal
1
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T. Wittkowski
series ordinal
2
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K. Jung
series ordinal
3
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M. R. Baklanov
series ordinal
5
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publication date
17 June 2002
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volume
80
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issue
24
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page(s)
4594-4596
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Identifiers

DOI
10.1063/1.1478775
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