(Q57638100)

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Sol-gel derived mesoporous silica films used as low dielectric constant materials

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scholarly article

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Sol-gel derived mesoporous silica films used as low dielectric constant materials (English)

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object named as

Xiao Hu

3

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author name string

Suzhu Yu

1

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Terence K.S. Wong

2

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Kantisara Pita

4

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publication date

September 2004

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Thin Solid Films

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462-463

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311-315

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Identifiers

10.1016/J.TSF.2004.05.029

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