(Q58059383)

English

Surface activation of thin silicon oxides by wet cleaning and silanization

article by Y. Han et al published July 2006 in Thin Solid Films

Statements

Surface activation of thin silicon oxides by wet cleaning and silanization (English)
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Y. Han
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D. Mayer
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A. Offenhäusser
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S. Ingebrandt
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July 2006
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510
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1-2
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175-180
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