Wikidata

(Q62124479)

English

Real-time monitoring of surface chemistry during plasma processing

scientific article published in January 1994

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Statements

title
Real-time monitoring of surface chemistry during plasma processing (English)
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author
Yves Chabal
series ordinal
3
object named as
Y. J. Chabal
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author name string
E. S. Aydil
series ordinal
1
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R. A. Gottscho
series ordinal
2
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publication date
1 January 1994
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volume
66
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issue
6
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page(s)
1381-1388
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Identifiers

 
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