(Q58238409)

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Images of dopant profiles in low-energy scanning transmission electron microscopy

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Images of dopant profiles in low-energy scanning transmission electron microscopy (English)

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V. Morandi

3

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P. G. Merli

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1

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F. Corticelli

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2

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language of work or name

English

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publication date

9 December 2002

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published in

Applied Physics Letters

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volume

81

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issue

24

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page(s)

4535-4537

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cites work

Mechanism for secondary electron dopant contrast in the SEM

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https://api.crossref.org/works/10.1063%2F1.1528734

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21 January 2018

Quantitative electron holography of biased semiconductor devices.

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https://api.crossref.org/works/10.1063%2F1.1528734

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21 January 2018

Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si

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reference URL

https://api.crossref.org/works/10.1063%2F1.1528734

retrieved

21 January 2018

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10.1063/1.1528734

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(Q58238409)

Images of dopant profiles in low-energy scanning transmission electron microscopy

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