(Q58431563)

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Polymorphous Silicon Films Deposited at 27.12 MHz

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scholarly article

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Polymorphous Silicon Films Deposited at 27.12 MHz (English)

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general chemistry

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object named as

H. Águas

2

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Isabel Maria Ferreira

object named as

I. Ferreira

3

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Elvira Fortunato

object named as

E. Fortunato

4

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author name string

R. Martins

1

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S. Lebib

5

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P. Roca i Cabarrocas

6

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L. Guimarães

7

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publication date

17 December 2003

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Chemical Vapor Deposition

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9

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333-337

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6

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Identifiers

10.1002/CVDE.200306261

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