(Q58591564)

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Atomic Layer Deposition of Antimony Oxide and Antimony Sulfide

scholarly article by Ren Bin Yang et al published 14 July 2009 in Chemistry of Materials

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Atomic Layer Deposition of Antimony Oxide and Antimony Sulfide (English)
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Ren Bin Yang
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Manfred Reiche
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Jürgen W. Gerlach
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Ulrich Gösele
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14 July 2009
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21
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2586-2588
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