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A highly sensitive quartz-crystal microbalance for sputtering investigations in slow ion–surface collisions

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A highly sensitive quartz-crystal microbalance for sputtering investigations in slow ion–surface collisions (English)

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M. Schmid

2

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Friedrich Aumayr

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F. Aumayr

series ordinal

5

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author name string

G. Hayderer

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1

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P. Varga

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3

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HP. Winter

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4

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publication date

September 1999

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published in

Review of Scientific Instruments

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volume

70

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issue

9

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page(s)

3696-3700

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cites work

Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung

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https://api.crossref.org/works/10.1063%2F1.1149979

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21 January 2018

Ion‐ and electron‐assisted gas‐surface chemistry—An important effect in plasma etching

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21 January 2018

Potential Sputtering of Lithium Fluoride by Slow Multicharged Ions

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https://api.crossref.org/works/10.1063%2F1.1149979

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21 January 2018

Comparison between BAW and SAW sensor principles

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https://api.crossref.org/works/10.1063%2F1.1149979

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21 January 2018

Potential Sputtering of Clean SiO 2 by Slow Highly Charged Ions

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21 January 2018

Comments on the effects of nonuniform mass loading on a quartz crystal microbalance.

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21 January 2018

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10.1063/1.1149979

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(Q59250553)

A highly sensitive quartz-crystal microbalance for sputtering investigations in slow ion–surface collisions

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