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(Q59372758)

English

Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography

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title
Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography (English)
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author
Deirdre L Olynick
series ordinal
4
object named as
Deirdre L. Olynick
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author name string
G. Y. Jung
series ordinal
1
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S. Ganapathiappan
series ordinal
2
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Douglas A. A. Ohlberg
series ordinal
3
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Y. Chen
series ordinal
5
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William M. Tong
series ordinal
6
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R. Stanley Williams
series ordinal
7
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publication date
July 2004
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published in
Nano Letters
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volume
4
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issue
7
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page(s)
1225-1229
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Identifiers

DOI
10.1021/NL049487Q
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