Wikidata

(Q59443932)

English

Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

scholarly article by R. B. Karabalin et al published 7 September 2009 in Applied Physics Letters

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title
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films (English)
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author name string
R. B. Karabalin
series ordinal
1
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M. H. Matheny
series ordinal
2
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X. L. Feng
series ordinal
3
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E. Defaÿ
series ordinal
4
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G. Le Rhun
series ordinal
5
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C. Marcoux
series ordinal
6
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P. Andreucci
series ordinal
8
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M. L. Roukes
series ordinal
9
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publication date
7 September 2009
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volume
95
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issue
10
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page(s)
103111
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Identifiers

DOI
10.1063/1.3216586
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