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Development of a parallel local oxidation nanolithography instrument
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title
Development of a parallel local oxidation nanolithography instrument
(English)
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author
Ricardo García
object named as
Ricardo Garcia
series ordinal
7
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Fabio Biscarini
object named as
Fabio Biscarini
series ordinal
3
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Laurens W. Molenkamp
series ordinal
6
object named as
Laurens W. Molenkamp
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Georg Schmidt
series ordinal
4
object named as
Georg Schmidt
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author name string
Javier Martinez
series ordinal
1
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Nuria S. Losilla
series ordinal
2
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Tanja Borzenko
series ordinal
5
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publication date
August 2006
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published in
Review of Scientific Instruments
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volume
77
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issue
8
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page(s)
086106
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Identifiers
DOI
10.1063/1.2336773
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