Wikidata

(Q59658749)

English

Nanolithography Based on Real-Time Electrically Controlled Indentation with an Atomic Force Microscope for Nanocontact Elaboration

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title
Nanolithography Based on Real-Time Electrically Controlled Indentation with an Atomic Force Microscope for Nanocontact Elaboration (English)
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author name string
K. Bouzehouane
series ordinal
1
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S. Fusil
series ordinal
2
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T. Blon
series ordinal
5
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M. Le Dû
series ordinal
6
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P. Seneor
series ordinal
7
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publication date
November 2003
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published in
Nano Letters
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volume
3
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issue
11
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page(s)
1599-1602
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Identifiers

DOI
10.1021/NL034610J
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arXiv ID
cond-mat/0306068
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