Wikidata

(Q59707562)

English

Scanning transmission electron microscopy of gate stacks with HfO2 dielectrics and TiN electrodes

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title
Scanning transmission electron microscopy of gate stacks with HfO2 dielectrics and TiN electrodes (English)
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author
Susanne Stemmer
object named as
Susanne Stemmer
series ordinal
4
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author name string
Melody P. Agustin
series ordinal
1
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Leonardo R. C. Fonseca
series ordinal
2
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Jacob C. Hooker
series ordinal
3
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publication date
19 September 2005
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volume
87
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issue
12
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page(s)
121909
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Identifiers

DOI
10.1063/1.2053362
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