(Q59877917)

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Fabrication of Si-based nanoimprint stamps with sub-20 nm features

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scholarly article

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Fabrication of Si-based nanoimprint stamps with sub-20 nm features (English)

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object named as

L. Montelius

7

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object named as

K. Deppert

4

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Martin H Magnusson

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ORCID Public Data File 2021

author name string

I. Maximov

1

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E.-L. Sarwe

2

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M. Beck

3

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M. Graczyk

5

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M.H. Magnusson

6

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publication date

July 2002

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Microelectronic Engineering

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61-62

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449-454

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Nanoimprint lithography at the 6 in. wafer scale

1 reference

https://api.crossref.org/works/10.1016%2FS0167-9317%2802%2900488-4

7 January 2021

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Identifiers

10.1016/S0167-9317(02)00488-4

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