Wikidata

(Q60033185)

English

High quality mechanical and optical properties of commercial silicon nitride membranes

scientific article published on 10 March 2008

In more languages

Statements

title
High quality mechanical and optical properties of commercial silicon nitride membranes (English)
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author name string
B. M. Zwickl
series ordinal
1
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W. E. Shanks
series ordinal
2
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A. M. Jayich
series ordinal
3
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C. Yang
series ordinal
4
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A. C. Bleszynski Jayich
series ordinal
5
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J. G. E. Harris
series ordinal
7
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publication date
10 March 2008
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volume
92
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issue
10
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page(s)
103125
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Identifiers

DOI
10.1063/1.2884191
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arXiv ID
0711.2263
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