Wikidata

(Q61803640)

English

Micromachined AFM transducer with differential capacitive read-out

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Statements

title
Micromachined AFM transducer with differential capacitive read-out (English)
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author name string
J Bay
series ordinal
1
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S Bouwstra
series ordinal
2
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E Laegsgaard
series ordinal
3
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publication date
1 June 1995
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volume
5
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issue
2
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page(s)
161-165
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Identifiers

 
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