Wikidata

(Q61825429)

English

Nanometre-scale oxidation of silicon surfaces by dynamic force microscopy: reproducibility, kinetics and nanofabrication

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title
Nanometre-scale oxidation of silicon surfaces by dynamic force microscopy: reproducibility, kinetics and nanofabrication (English)
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author name string
M Calleja
series ordinal
1
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J Anguita
series ordinal
2
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K Birkelund
series ordinal
4
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F Pérez-Murano
series ordinal
5
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J A Dagata
series ordinal
6
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publication date
1 January 1999
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volume
10
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issue
1
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page(s)
34-38
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