Wikidata

(Q61825433)

English

Local oxidation of silicon surfaces by dynamic force microscopy: Nanofabrication and water bridge formation

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title
Local oxidation of silicon surfaces by dynamic force microscopy: Nanofabrication and water bridge formation (English)
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author
Francesc Pérez-Murano
object named as
Francesc Pérez-Murano
series ordinal
3
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Montserrat Calleja Gómez
series ordinal
2
object named as
Montserrat Calleja
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author name string
Ricardo Garcı́a
series ordinal
1
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publication date
4 May 1998
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volume
72
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issue
18
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page(s)
2295-2297
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Identifiers

DOI
10.1063/1.121340
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