(Q62570363)

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Deep level defects in electron-irradiated 4H SiC epitaxial layers

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scholarly article

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Deep level defects in electron-irradiated 4H SiC epitaxial layers (English)

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5

object named as

E. Janzén

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Carl Hemmingsson

1

object named as

C. Hemmingsson

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Nguyen Tien Son

2

object named as

N. T. Son

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3

object named as

O. Kordina

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author name string

J. P. Bergman

4

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J. L. Lindström

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S. Savage

7

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N. Nordell

8

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publication date

May 1997

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Journal of Applied Physics

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81

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9

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6155-6159

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Identifiers

10.1063/1.364397

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