Wikidata

(Q62590364)

English

Optical and structural properties of silicon-rich silicon oxide films: Comparison of ion implantation and molecular beam deposition methods

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title
Optical and structural properties of silicon-rich silicon oxide films: Comparison of ion implantation and molecular beam deposition methods (English)
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author
Leonid Khriachtchev
series ordinal
10
object named as
Leonid Khriachtchev
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Markku Räsänen
series ordinal
4
object named as
Markku Räsänen
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author name string
Timur Nikitin
series ordinal
1
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Kerttu Aitola
series ordinal
2
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Sergei Novikov
series ordinal
3
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Rama Velagapudi
series ordinal
5
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Jani Sainio
series ordinal
6
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Jouko Lahtinen
series ordinal
7
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Kenichiro Mizohata
series ordinal
8
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Tommy Ahlgren
series ordinal
9
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publication date
18 May 2011
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volume
208
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issue
9
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page(s)
2176-2181
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