Wikidata

(Q62617360)

English

Three-dimensional imaging of individual hafnium atoms inside a semiconductor device

scholarly article by Klaus van Benthem et al published 18 July 2005 in Applied Physics Letters

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Statements

title
Three-dimensional imaging of individual hafnium atoms inside a semiconductor device (English)
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author
Klaus van Benthem
object named as
Klaus van Benthem
series ordinal
1
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Scott D. Findlay
object named as
Scott D. Findlay
series ordinal
8
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Miyoung Kim
series ordinal
3
object named as
Miyoung Kim
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author name string
Andrew R. Lupini
series ordinal
2
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Hion Suck Baik
series ordinal
4
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SeokJoo Doh
series ordinal
5
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Jong-Ho Lee
series ordinal
6
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Mark P. Oxley
series ordinal
7
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Leslie J. Allen
series ordinal
9
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Julia T. Luck
series ordinal
10
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Stephen J. Pennycook
series ordinal
11
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publication date
18 July 2005
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volume
87
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issue
3
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page(s)
034104
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Identifiers

DOI
10.1063/1.1991989
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